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AP300
產品描述

-Manufacturer : Ultratech

-Type : Wafer Stepper

-Model : AP300


技術支持

Ultratech Stepper AP300 (i-Line Stepper) 

Configuration:

1、 Standard Features Target: 

-2.0 um, Extended Field, ghi-lineBroadband Lens ?  Dual 1200 W LampIlluminator

-Universal Size/Warped Wafer Kit: 200,and 300mm.

-FOSB Cassette to Cassette WaferHandling

-Wafer Thickness Handling from 0.4 mmto 2.0 mm 

-PATMAX MVS Alignment System

-MVS Alignment Spectrum of 530 - 570 nm 

-Lens Distortion Reference - No lensmatching 

-6 Slot Reticle Stack, Manual FrontLoading   GEM HSMS Communications 

-Power Source: 208 V three phase, 5wire, 150 amp 

-Environmental Chamber

2、 AP300 Test Reticle 6x6

3、 FOUP Wafer Handler

4、 Enhanced Bottom Pellicle Protection

5、 ghi-line AutoFilter Changer 

6、 Edge Exclusion System with one Exclusion Ring Specify ring size (15mm) 

7、 Closed Loop Cooling 

8、 Prism Purge Kit (requires CLC) 


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